이빔 크루시블 라이너 사용에 관한 가이드

The optional crucible liners available from Temescal increase evaporation rates by reducing heat transfer
between the evaporant and the water-cooled crucible. They also allow particulate-free pocket replenishment
and eliminate the risk of cross-contamination when one material replaces another in a given pocket. Liners
are available in the following materials:

 

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1. Molybdenum. These are high-strength inserts machined from solid-rod molybdenum. When considering
the use of these liners, users should be aware that some metals alloy with molybdenum.
2. Tungsten. In most respects, tungsten liners are suitable for the same range of applications as molybdenum
liners. The one significant difference is that tungsten has a higher melting point than molybdenum.
3. Intermetallic composite (titanium diboride/boron nitride). Liners made of this material are most commonly
used for evaporating aluminum. They should not be used with metals that have high melting temperatures,
such as tantalum and tungsten, or with materials that react with boron, such as nickel, silicon,
iron, silicon monoxide, silicon dioxide, cobalt, and titanium. These liners have good thermal-shock resistance
up to 1800°C (3272°F).

 

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4. Graphite. These liners are machined from ATJ-grade solid-rod graphite. Materials such as pure gold,
silver, and copper do not alloy with graphite and are easily removed from the insert.
5. POCO graphite. Liners made of this material are effective in aluminum evaporation processes. Their
use impedes the formation of aluminum carbide.

6. Vitreous carbon. Liners made of vitreous carbon are nonporous and highly resistant to chemical attack,
and their use minimizes spitting and virtually eliminates spalling. However, they can only be used once
for the evaporation of silicon, aluminum, nickel, tantalum, titanium, or any other carbide-forming material.
7. Aluminum oxide (Al2O3).
For information on available sizes and ordering numbers, consult the current Temescal price list.

 

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