이온 빔 동작 순서

An automatic controller is normally used for startup or shutdown of an endHall source. The sequence most often used is described below. Knowledge of this sequence should be useful in programming a controller, or troubleshooting when operating problems arise. The currents and voltages used are defined in Fig. VI-2. 1. Pumpdown. The vacuum chamber in which the gridless source is installed shoul be..

2020.12.18