a-Si 증착 조건 참고

https://www.seas.upenn.edu/~nanosop/PECVD_Recipes.htm PECVD_Recipes PECVD Recipes Updated on 10/9/2014 Note: Since the process is carried out at high temperature, some outgas or vaporized species out of a dirty wafer may affect the quality of the deposited film. So, make sure that the wafer-as-received is cleaned with Acet www.seas.upenn.edu PECVD Recipes Updated on 10/9/2014 Note: Since the pro..

2023.08.23