Glancing Angle Deposition (GLAD) E-Beam System

참고파일, 사이트 https://www.scia-systems.com/products/e-beam-evaporation/scia-eva-200 scia Eva 200 Glancing Angle Deposition for Precise Nanostructures With the scia Eva 200 ultra-pure coatings can be deposited on up to 200 mm wafers by electron beam (e-beam) evaporation. The system enables up to 12 target materials in crucible-pockets and can be config www.scia-systems.com http://koreavac.com/sub/pro..

2023.02.28